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晶研科技股份有限公司
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arrow 高密度電漿化學氣相沉積設
  Inductively Coupled Plasma – High Density
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arrow 電漿輔助化學氣相沉積設備
  Plasma Enhanced Chemical Vapor Deposition
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arrow 活性離子蝕刻設備
  Reative lon Etcher
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arrow 匹配器
  Automatic Matching Network
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arrow 射頻產生器
  Automatic Matching Network

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